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Compact Laser MBE Device "PAC-LMBE"

Easy-to-handle design allows for easy control of various film formation conditions! Six types of targets can be used.

The "PAC-LMBE" is a highly scalable ultra-high vacuum laser MBE (PLD) system. As a substrate heating unit, you can choose between infrared lamp heating and semiconductor laser heating. Six types of targets can be used. Additionally, the load-lock chamber unit allows for easy exchange of targets and substrates in a vacuum. 【Features】 ■ Highly scalable ■ Achievable vacuum level: below 6.7×10^-7Pa (5×10^-9Torr) ■ Six types of targets available ■ Easy exchange of targets and substrates in a vacuum with the load-lock chamber unit ■ Optional ports: various components can be mounted *For more details, please refer to the PDF materials or feel free to contact us.

  • Evaporation Equipment
  • Compact laser MBE equipment

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